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EUV Fused Silica Specifications

Leak Rate: <2x10(-10) atm cc/sec He
Parallelism: <10 Arc Seconds
Flange Material:  304/316 Stn. Stl.
Flatness:  l /4@ 632 nm Transmitted Wavefront
Surface Finish:
20/10 
Thermal Range: 
-100°C to 200°C
Material: 
Corning ARF 193 Fused Silica
Transmission: 
>99.5% @ 193nm (internal)
Homogeneity Grade: 
A
Inclusion Class:
0

Operating Conditions
The thermal ratings specified are safe operating limits determined by various factors including material properties, mechanical design, and the intended operating environment. Temperature ratings for various mounting options may reduce the operating range of a window assembly. All assemblies have a maximum thermal gradient of 25ºC per minute and may be damaged if this limit is exceeded.



VIEWPORT, FUSED SILICA, EUV, 0.6 VIEW, 133CF
VIEWPORT, FUSED SILICA, EUV, 0.6 VIEW, 133CF
EUV Grade (Excimer) Fused Silica Viewport, Zero Length Profile, 0.63" View Dia, 1.33" Conflat Flange
A1671-3-CF
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$504.00
49584
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VIEWPORT, FUSED SILICA, EUV, 1.4 VIEW, 275CF
VIEWPORT, FUSED SILICA, EUV, 1.4 VIEW, 275CF
EUV Grade (Excimer) Fused Silica Viewport, Zero Length Profile, 1.40" View Dia, 2.75" Conflat Flange
A0652-1-CF
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$683.00
49580
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VIEWPORT, FUSED SILICA, EUV, 1.4 VIEW, 338CF
VIEWPORT, FUSED SILICA, EUV, 1.4 VIEW, 338CF
EUV Grade (Excimer) Fused Silica Viewport, Zero Length Profile, 1.40" View Dia, 3.88" Conflat Flange
A0652-2-CF
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$709.00
49902
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VIEWPORT, FUSED SILICA, EUV, 1.4 VIEW, WELD
VIEWPORT, FUSED SILICA, EUV, 1.4 VIEW, WELD
EUV Grade (Excimer) Fused Silica Viewport, 1.37" View Dia, 1.50" Dia Stainless Steel Weld Adapter
A0657-16-W
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$641.00
49582
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VIEWPORT, FUSED SILICA, EUV, 2.4 VIEW, WELD
VIEWPORT, FUSED SILICA, EUV, 2.4 VIEW, WELD
EUV Grade (Excimer) Fused Silica Viewport, 2.37" View Dia, 2.50" Dia Stainless Steel Weld Adapter
A0657-17-W
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$1,638.00
49583
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VIEWPORT, FUSED SILICA, EUV, 2.7 VIEW, 450CF
VIEWPORT, FUSED SILICA, EUV, 2.7 VIEW, 450CF
EUV Grade (Excimer) Fused Silica Viewport, Zero Length Profile, 2.69" View Dia, 4.50" Conflat Flange
A0652-3-CF
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$1,523.00
49581
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VIEWPORT, FUSED SILICA, EUV, 2.7 VIEW, 462CF
VIEWPORT, FUSED SILICA, EUV, 2.7 VIEW, 462CF
EUV Grade (Excimer) Fused Silica Viewport, Zero Length Profile, 2.69" View Dia, 4.62" Conflat Flange
A0652-4-CF
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$1,549.00
49903
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VIEWPORT, FUSED SILICA, EUV, 3.9 VIEW, 600CF
VIEWPORT, FUSED SILICA, EUV, 3.9 VIEW, 600CF
EUV Grade (Excimer) Fused Silica Viewport, Zero Length Profile, 3.88" View Dia, 6.00" Conflat Flange
A0652-5-CF
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$2,573.00
49891
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VIEWPORT, FUSED SILICA, EUV, 3.9 VIEW, 675CF
VIEWPORT, FUSED SILICA, EUV, 3.9 VIEW, 675CF
EUV Grade (Excimer) Fused Silica Viewport, Zero Length Profile, 3.88" View Dia, 6.75" Conflat Flange
A0652-6-CF
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$2,599.00
49904
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