DUV Fused Silica Specifications

Leak Rate:	<2x10(-10) atm cc/sec He
Parallelism:	<10 Arc Seconds
Flange Material:	304/316 Stn. Stl.
Flatness:	l /4@ 632 nm Transmitted Wavefront
Surface Finish:	20/10
Thermal Range:	-100°C to 200°C
Material:	Corning HPFS 7980 Fused Silica
Transmission:	>99.8% @ 248nm (internal)
Homogeneity Grade:	A
Inclusion Class:	0

Operating Conditions

The thermal ratings specified are safe operating limits determined by various factors including material properties, mechanical design, and the intended operating environment. Temperature ratings for various mounting options may reduce the operating range of a window assembly. All assemblies have a maximum thermal gradient of 25ºC per minute and may be damaged if this limit is exceeded.

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DUV Fused Silica Viewports