DUV Fused Silica Specifications |
| Leak Rate: | <2x10(-10) atm cc/sec He | | Parallelism: | <10 Arc Seconds | | Flange Material: | 304/316 Stn. Stl.
| | Flatness: | l /4@ 632 nm Transmitted Wavefront
| Surface Finish:
| 20/10
| Thermal Range:
| -100°C to 200°C
| Material:
| Corning HPFS 7980 Fused Silica
| Transmission:
| >99.8% @ 248nm (internal)
| Homogeneity Grade:
| A
| Inclusion Class:
| 0
| |  |
Operating Conditions
The thermal ratings specified are safe operating limits determined by various factors including material properties, mechanical design, and the intended operating environment. Temperature ratings for various mounting options may reduce the operating range of a window assembly. All assemblies have a maximum thermal gradient of 25ºC per minute and may be damaged if this limit is exceeded.
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