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Ceramic To Metal Technology

Fused Silica

UV Fused Silica Specifications

Leak Rate: <2x10(-10) atm cc/sec He
Parallelism: <30 Arc Minutes
Flange Material:  304/316 Stn. Stl.
Surface Finish:
40/20 
Thermal Range: 
-100°C to 200°C
Material: 
Corning HPFS 7980 Fused Silica
Transmission: 
>90% @ 250nm (external)
Homogeneity Grade: 
F
Inclusion Class:
2

Operating Conditions

The thermal ratings specified are safe operating limits determined by various factors including material properties, mechanical design, and the intended operating environment. Temperature ratings for various mounting options may reduce the operating range of a window assembly. All assemblies have a maximum thermal gradient of 25ºC per minute and may be damaged if this limit is exceeded.


DUV Fused Silica Specifications

Leak Rate: <2x10(-10) atm cc/sec He
Parallelism: <10 Arc Seconds
Flange Material:  304/316 Stn. Stl.
Flatness:  l /4@ 632 nm Transmitted Wavefront
Surface Finish:
20/10 
Thermal Range: 
-100°C to 200°C
Material: 
Corning HPFS 7980 Fused Silica
Transmission: 
>99.8% @ 248nm (internal)
Homogeneity Grade: 
A
Inclusion Class:
0

Operating Conditions

The thermal ratings specified are safe operating limits determined by various factors including material properties, mechanical design, and the intended operating environment. Temperature ratings for various mounting options may reduce the operating range of a window assembly. All assemblies have a maximum thermal gradient of 25ºC per minute and may be damaged if this limit is exceeded.


EUV Fused Silica Specifications

Leak Rate: <2x10(-10) atm cc/sec He
Parallelism: <10 Arc Seconds
Flange Material:  304/316 Stn. Stl.
Flatness:  l /4@ 632 nm Transmitted Wavefront
Surface Finish:
20/10 
Thermal Range: 
-100°C to 200°C
Material: 
Corning ARF 193 Fused Silica
Transmission: 
>99.5% @ 193nm (internal)
Homogeneity Grade: 
A
Inclusion Class:
0

Operating Conditions

The thermal ratings specified are safe operating limits determined by various factors including material properties, mechanical design, and the intended operating environment. Temperature ratings for various mounting options may reduce the operating range of a window assembly. All assemblies have a maximum thermal gradient of 25ºC per minute and may be damaged if this limit is exceeded.


Fused Silica Viewports/Windows Custom-Designed for Your Application

MPF manufactures Sapphire and Fused Silica viewports using proprietary vacuum brazing and welding techniques. Fused Silica viewport designs are available with diameters up to 8 inches and include zero length designs for low profile applications. These are all bakeable to 200˚C. Several standard grades of Fused Silica windows are offered Several standard grades of Fused Silica windows are offered having excellent transmission from 193m to 2 microns.

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  • MPF Products Inc.
  • 3046 Bramlett Church Road
  • Gray Court, SC 29645

 


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