Fused Silica

Fused Silica is glass consisting of silica in amorphous (non-crystalline) form. It differs from normal glasses in that it contains no other materials, which are added to glass to lower the melt temperature. This material is non-birefringent and has high working and melting temperatures.  It is widely used in the semiconductor sector as well as laboratory equipment.  It transmits UV better than other glasses.  The low Coefficient of Thermal Expansion (CTE) of this material makes it a useful material for precision mirror substrates.

MPF Products, Inc. does not approve the use of ultrasonic cleaning for any viewport.  We ship our viewports UHV ready.  You may simply blow off the glass to remove any contaminants with clean, dry air.  For additional cleaning steps for particulates or contamination from other processes, please review our cleaning procedures at UHV Viewport Cleaning Notes.

Bake-Out Ramp Rate: 20°C per Minute

– UV Fused Silica Transmission Chart

– DUV Fused Silica Transmission Chart

– EUV Fused Silica Transmission Chart