UHV Feedthroughs in Semiconductor Manufacturing
Semiconductor process tools – including PVD, ALD, CVD, ion implantation, and advanced etch systems – use UHV or near-UHV conditions to minimize surface contamination and improve film purity. Hermetic feedthroughs carry electrical power, RF signals, thermocouples, and motion actuators through chamber walls without introducing leak paths. Selecting feedthroughs with the